文献
J-GLOBAL ID:201702238893070419
整理番号:17A0400992
非晶質炭窒化けい素薄膜の構造と光ルミネセンスに及ぼす炭素の影響【Powered by NICT】
The influence of carbon on the structure and photoluminescence of amorphous silicon carbonitride thin films
著者 (4件):
Khatami Z.
(Department of Engineering Physics and Centre for Emerging Device Technologies, McMaster University, Hamilton, Ontario L8S 4L7, Canada)
,
Wilson P.R.J.
(Department of Engineering Physics and Centre for Emerging Device Technologies, McMaster University, Hamilton, Ontario L8S 4L7, Canada)
,
Wojcik J.
(Department of Engineering Physics and Centre for Emerging Device Technologies, McMaster University, Hamilton, Ontario L8S 4L7, Canada)
,
Mascher P.
(Department of Engineering Physics and Centre for Emerging Device Technologies, McMaster University, Hamilton, Ontario L8S 4L7, Canada)
資料名:
Thin Solid Films
(Thin Solid Films)
巻:
622
ページ:
1-10
発行年:
2017年
JST資料番号:
B0899A
ISSN:
0040-6090
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)