文献
J-GLOBAL ID:201702250566012738
整理番号:17A0362541
MEMS容量性スイッチの誘電体帯電評価のためのプルアップ容量-電圧特性の深さの解析【Powered by NICT】
An in depth analysis of pull-up capacitance-voltage characteristic for dielectric charging assessment of MEMS capacitive switches
著者 (4件):
Koutsoureli M.
(Physics Department, University of Athens, 15784 Panepistimioupolis, Athens, Greece)
,
Birmpiliotis D.
(Physics Department, University of Athens, 15784 Panepistimioupolis, Athens, Greece)
,
Michalas L.
(Physics Department, University of Athens, 15784 Panepistimioupolis, Athens, Greece)
,
Papaioannou G.
(Physics Department, University of Athens, 15784 Panepistimioupolis, Athens, Greece)
資料名:
Microelectronics Reliability
(Microelectronics Reliability)
巻:
64
ページ:
688-692
発行年:
2016年
JST資料番号:
C0530A
ISSN:
0026-2714
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)