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J-GLOBAL ID：201702270748356162   整理番号：17A0214148

EUVパターン形成と二重歪高移動度チャンネルを特徴とする7nm FinFET技術【Powered by NICT】

A 7nm FinFET technology featuring EUV patterning and dual strained high mobility channels
著者 (87件)：
Xie R.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Montanini P.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Akarvardar K.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Tripathi N.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Haran B.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Johnson S.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Hook T.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Hamieh B.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Corliss D.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Wang J.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Miao X.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Sporre J.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Fronheiser J.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Loubet N.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Sung M.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Sieg S.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Mochizuki S.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Prindle C.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Seo S.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Greene A.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Shearer J.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Labonte A.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Fan S.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Liebmann L.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Chao R.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Arceo A.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Chung K.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Cheon K.
(Samsung Electronics, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Adusumilli P.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Amanapu H.P.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Bi Z.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Cha J.
(Samsung Electronics, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Chen H.-C.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Conti R.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Galatage R.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Gluschenkov O.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Kamineni V.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Kim K.
(Samsung Electronics, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Lee C.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Lie F.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Liu Z.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Mehta S.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Miller E.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Niimi H.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Niu C.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Park C.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Park D.
(Samsung Electronics, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Raymond M.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Sahu B.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Sankarapandian M.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Siddiqui S.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Southwick R.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Sun L.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Surisetty C.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Tsai S.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Whang S.
(Samsung Electronics, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Xu P.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Xu Y.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Yeh C.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Zeitzoff P.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Zhang J.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Li J.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Demarest J.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Arnold J.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Canaperi D.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Dunn D.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Felix N.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Gupta D.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Jagannathan H.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Kanakasabapathy S.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Kleemeier W.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Labelle C.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Mottura M.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Oldiges P.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Skordas S.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Standaert T.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Yamashita T.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Colburn M.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Na M.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Paruchuri V.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Lian S.
(Samsung Electronics, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Divakaruni R.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Gow T.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Lee S.
(Samsung Electronics, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Knorr A.
(GLOBALFOUNDRIES, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Bu H.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)
, 
Khare M.
(IBM Research, Albany Nanotechnology Center, 257 Fuller Road, Albany, NY 12203)

資料名：
IEEE Conference Proceedings  (IEEE Conference Proceedings)

巻： 2016  号： IEDM  ページ： 2.7.1-2.7.4  発行年： 2016年 
JST資料番号： W2441A  資料種別： 会議録 (C)
記事区分： 原著論文  発行国： アメリカ合衆国 (USA)  言語： 英語 (EN)
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