KOBAYASHI, M. A micromechanical tunable interferometer for free-space optical interconnection. Proc. IEEE/LEOS Optical MEMS'97. 1997, 171-175
SARAN, A. Anodic bonding of optical fibers to silicon for integrating MEMS based optical pressure and temperature sensors onto optical fibers. Proc. Solid-State Sensors and Actuators (Transducers '03). 2003, 564-567