文献
J-GLOBAL ID:200902015656609043
整理番号:91A0622339
低エネルギー高速原子ビーム源
A low-energy fast-atom beam source.
著者 (3件):
GORBATOV Y B
(Inst. Microelectronics Technology and High Purity Materials, USSR Academy of Sciences, Moscow District, SUN)
,
VYATKIN A F
(Inst. Microelectronics Technology and High Purity Materials, USSR Academy of Sciences, Moscow District, SUN)
,
ZINENKO V I
(Inst. Microelectronics Technology and High Purity Materials, USSR Academy of Sciences, Moscow District, SUN)
資料名:
Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms
(Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)
巻:
55
号:
1/4
ページ:
328-330
発行年:
1991年04月
JST資料番号:
H0899A
ISSN:
0168-583X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)