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J-GLOBAL ID：200901020479110114   Update date: Feb. 01, 2024

Seki Toshio

セキ トシオ | Seki Toshio
Affiliation and department：
Kyoto University Graduate School of Engineering, Department of Nuclear Engineering

About Kyoto University Graduate School of Engineering, Department of Nuclear Engineering


Other affiliations (1)：
Homepage URL  (2)： https://www.ne.t.kyoto-u.ac.jp/ja/research/introduction/q_beam ,  https://www.ne.t.kyoto-u.ac.jp/en/research/introduction/q_beam?set_language=en
Research field  (5)： Quantum beam science ,  Material fabrication and microstructure control ,  Applied physics - general ,  Thin-film surfaces and interfaces ,  Nanostructure chemistry
Research keywords  (7)： SIMS ,  クラスター ,  量子ビーム科学 ,  ナノ構造材料 ,  ノズル ,  nano-processing ,  cluster ion beam
Research theme for competitive and other funds  (7)：
  • 2017 - 2021 Ambient SIMS Technique for Liquid-Solid Interface Analysis
  • 2015 - 2018 Development of surface process technology with high speed and no damage by huge composite cluster
  • 2014 - 2016 高反応性中性クラスタービームによる微細パターンエッチング
  • 2011 - 2014 Development of analytical technique for organic materials with massive cluster ion beams
  • 2010 - 2012 Development of Nano-scale structure design and process technology by advanced composite cluster beam
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Papers (150)：
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MISC (80)：
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Patents (24)：
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Books (2)：
  • New practical vacuum technology
    2019 ISBN:9784860435592
  • クラスターイオンビーム基礎と応用
    日刊工業新聞社 2006
Lectures and oral presentations  (259)：
  • Ambient Secondary Ion Mass Analysis with MeV-energy Heavy Ion
    (11th International Symposium on Atomic Level Characterizations for New Materials and Devices ’17 (ALC`17) 2017)
  • Fabrication of 3D structure by double-angled etching with reactive gas cluster injection
    (The 39th International Symposium on Dry Process(DPS2017) 2017)
  • Characterization of Bio-Molecules with GCIBSIMS equipped with MS/MS Spectrometer
    (AVS 64th International Symposium & Exhibition 2017 (AVS64) 2017)
  • Organic Material Analysis with a SIMS System with Q-TOF MS/MS Technique
    (The 8th International Symposium on Surface Science (ISSS-8) 2017)
  • Ambient SIMS using MeV-Energy Heavy Ion
    (The 23rd International Conference on Ion Beam Analysis (IBA-2017) 2017)
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Education (3)：
  • 1997 - 2000 Kyoto University Graduate School of Engineering Deprtment of Electronic Science and Engineering
  • 1995 - 1997 Kyoto University Graduate School of Engineering Deprtment of Electronic Science and Engineering
  • 1991 - 1995 Kyoto University Faculty of Engineering School of Electrical & Electronic Engineering
Professional career (1)：
  • Doctor(Engineering) (Kyoto University)
Work history (4)：
  • 2007/05 - 現在 京都大学 大学院 工学研究科 原子核工学専攻 兼 附属情報センター 講師
  • 2005/06 - 2007/04 Kyoto University Quantum Science and Engineering Center, Graduate School of Engineering
  • 2003/04 - 2005/05 財団法人大阪科学技術センター 技術・情報振興部 研究員
  • 2000 - 2003 Kyoto University Graduate School of Engineering
Committee career (13)：
  • 2020/04 - 現在 SISS実行委員会 委員
  • 2020/04 - 現在 応用物理学会 学術講演会プログラム編集委員
  • 2020/10 - 2024/09 IBA-2021,PIXE-2021合同国際会議 実行委員
  • 2023/02 - 2023/12 第44回ドライプロセス国際シンポジウム組織委員会 プログラム委員
  • 2022/02 - 2023/10 The 14th International Symposium on Atomic Level Characterizarions for New Materials and Devices (ALC’22) Program Committee
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Awards (2)：
  • 2016/11 - The 38th International Symposium on Dry Process (DPS2016) Best Presentation Award
  • 1998 - Best Student Award of Ion Implantation Technology Conference
Association Membership(s) (1)：
Japan Society of Applied Physics
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