Rchr
J-GLOBAL ID:200901027835072294   Update date: Jan. 17, 2024

Morita Kazuhiro

モリタ カズヒロ | Morita Kazuhiro
Affiliation and department:
Research field  (1): Control and systems engineering
Research keywords  (2): 制御工学 ,  control engineering
Research theme for competitive and other funds  (3):
  • 2008 - 半導体検査装置の高精度化
  • 2000 - 2005 電子線描画装置の高精度化
  • 2000 - 2005 Electron Beam Lithography
Papers (9):
MISC (6):
  • Kazuhiro Morita. 中性子線ラジオグラフィ. 2008
  • Kazuhiro Morita. ダイヤモンド紫外線センサー. 2008. 46. 4. 272-277
  • Kazuhiro Morita. 動くものの内部も撮れるX線CT. 2007
  • Kazuhiro Morita. レーザを応用した微粒子計測機器/高精度衛星測位システム技術移転可能性調査. 2002
  • Kazuhiro Morita. 微少量液滴塗布法. 2002
more...
Patents (18):
  • 荷電粒子線装置,及び試料検査方法
  • ステージ装置及び試料搬送装置並びに位置決め制御方法
  • 走査電子顕微鏡
  • レシピ実行時間演算装置および半導体検査装置
  • Method and apparatus for probe contacting
more...
Books (1):
  • 身近な電気・節電の知識
    オーム社 2011 ISBN:9784274210785
Lectures and oral presentations  (13):
  • Investigation of the Accuracy of Calculating Eccentricity Using the Complete Elliptic Integral of the Second Kind
    (2022)
  • Study of an Education Method of Electromagnetism for information oriented society
    (The Institution of Professional Engineers, Japan, Study Group for the Robotics 2021)
  • Improvement of Software Productivity by The Integrated Software Test Management System
    (2019 23rd International Computer Science and Engineering Conference (ICSEC) 2019)
  • Stabilization of the Precision Positioning Stage Working in the Vacuum Environment by Using the Disturbance Observer
    (The 4th IIAE International Conference on Industrial Application Engineering 2016 (ICIAE2016) 2016)
  • Mapleを活用した半導体製造装置用アクティブ除振システムの開発
    (System Level Engineering Symposium 2015 2015)
more...
Education (3):
  • 2015 - 2019 Tokyo University of Agriculture and Technology Department of Electronic and Information Engineering Division of Applied Electronics Engineering
  • 2003 - 2005 Ibaraki University
  • 1979 - 1984 Ibaraki National College of Technology Electronics Engineering
Professional career (1):
  • 博士(工学) (東京農工大学)
Work history (4):
  • 2020/04 - 現在 Yonago National Institute of Technology Department of Electronic Control Engineering Professor
  • 2001/04 - 2020/03 Ibaraki National College of Technology
  • 1984/04 - 2019/12 Hitachi High-Technologies Co. Ltd.
  • 1998/04 - 2005/03 National Institute of Advanced Industrial Science and Technology visiting research scholar
Committee career (2):
  • 2017/04 - 現在 日本技術士会 ロボット技術研究会 Chairman
  • 2022/09 - 2023/03 医療機器開発・収益化支援補助金審査委員会 審査委員
Awards (1):
  • 2020/01 - The Institute of Industrial Applications Engineers The Best Paper Award for 2019 A Design Method of Precise Positioning Stage in Vacuum Environment by Disturbance Observer with Position Dependent Parameter
Association Membership(s) (2):
The Institute of Industrial Applications Engineers ,  The Japan Society for Precision Engineering
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