Kobayashi Shinichi

コバヤシシンイチ | Kobayashi Shinichi

Affiliation and department：
Job title： Professor
Homepage URL (1)： http://www.t-kougei.ac.jp/engineering/index.html

Research field (3)： Electric/electronic material engineering , Crystal engineering , Applied materials

Research keywords (4)：半導体の基礎物性 , 半導体プラズマプロセス , Physics of Semiconductors , Plasma Processing of Semiconductors

Research theme for competitive and other funds (5)：

2000 - 2002 Fabrication of high performance nano-crystalline germanium films using ultra-clean ECR plasma CVD
1998 - 1999 次世代超LSI用材料Si/Ge薄膜の成長に関する研究
1997 - 1998 次世代超LSI材料SiGeを拡散源としたSi中への不純物拡散の研究
高品質アモルファス及び微結晶Ge膜の成膜と膜質評価
Deposition and Characterization of High-quality Amorphous and microcrystalline Ge Films

Papers (21)：

Yoji Yasuda, Shin-ichi Kobayashi, Yoichi Hoshi. Photocatalytic properties of annealed TiO2 films with controlled structure fabricated using oxygen-ion-assisted reactive evaporation with glancing angle deposition technique. AIP Advances. 2022. 12. 1
Yoji Yasuda, Shin-ichi Kobayashi, Takayuki Uchida, Yoichi Hoshi. Top-emission organic light emitting diode with indium tin oxide top-electrode films deposited by a low-damage facing-target type sputtering method. Thin Solid Films. 2020. 698. 137868-137868
Yoji Yasuda, Yoichi Hoshi, Shin-ichi Kobayashi, Takayuki Uchida, Yutaka Sawada, Meihan Wang, Hao Lei. Reactive sputter deposition of WO3 films by using two deposition methods. Journal of Vacuum Science & Technology A. 2019. 37. 3. 031514-031514
Y Sawada, Y Hashimoto, Y Hoshi, T Uchida, S Kobayashi, L Sun, B Yue. Crystal Orientation and Electrical Properties of Tin Oxide Transparent Conducting Films Deposited on Rutile Surface. IOP Conference Series: Materials Science and Engineering. 2017. 250. 012021-012021
Yasuda Yoji, Hoshi Yoichi, Kobayashi Shin-ichi, Uchida Takayuki. Development of sputter-deposition process for the deposition of top electrode films in OLED. Abstract of annual meeting of the Surface Science of Japan. 2017. 37. 0. 90-90

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MISC (1)：

Works (2)：

Education (3)：

Professional career (1)：

Association Membership(s) (2)：

Materials Research Society , 応用物理学会

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