Rchr
J-GLOBAL ID：200901034582052336   Update date: Jan. 30, 2024

Hirai Akiko

ヒライ アキコ | Hirai Akiko
Affiliation and department：
National Institute of Advanced Industrial Science and Technology

About National Institute of Advanced Industrial Science and Technology


Homepage URL  (1)： http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=A35249035
Research field  (1)： Optical engineering and photonics
Research keywords  (4)： Low coherence interferometry ,  Interferometry ,  Optical measurement ,  Metrology standard
Research theme for competitive and other funds  (5)：
  • 2022 - 2025 Development of a high-precision method for measuring the group refractive index using a dual-comb spectral interferometer and a double-sided interferometer.
  • 2019 - 2023 Development of simultaneous measurement method for geometrical thickness and refractive index of transparent plate by tandem low-coherence double-sided interferometer
  • 2011 - 2013 Development of system for measurement of phase refractive and group refractive dispersions by broadband interferometer
  • 2010 - 2012 A study to develop super-wide band heterodyne interferometry for hyper-multispectral three-dimensional imaging
  • 1.干渉測長 2.低コヒーレンス干渉
Papers (77)：
  • Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Evaluation of the change in photoresist sidewall roughness due to electron beam-induced shrinkage using atomic force microscopy. Journal of Micro/Nanopatterning, Materials, and Metrology. 2023. 22. 04
  • Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda, Satoru Takahashi. Developmental framework of line edge roughness reference standards for next-generation functional micro-/nanostructures. Precision Engineering. 2023. 83. 152-158
  • Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda, Satoru Takahashi. Effect of white noise on roughness measurements of self-affine fractals. Measurement Science and Technology. 2023. 34. 10. 105003-105003
  • Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Photoresist shrinkage observation by a metrological tilting-AFM. Metrology, Inspection, and Process Control XXXVII. 2023
  • Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Enhancing the precision of 3D sidewall measurements of photoresist using atomic force microscopy with a tip-tilting technique. Journal of Applied Physics. 2023. 133. 6. 065302-065302
ｍore...
MISC (18)：
  • Heterodyne interferometer with spatially separated beams realizing nonlinearity less than 10 pm. 2016. 25-28
  • HIRAI Akiko. Past and present of the Japanese prototype of metre. 2015. 37. 1. 1-5
  • HIRAI Akiko. Optical Interferometry. 2013. 42. 4. 186-188
  • 高辻 利之, 美濃島 薫, 鍜島 麻理子, 寺田 聡一, 平井 亜紀子, 堀 泰明, 尾藤 洋一, 権太 聡, 大澤 尊光, 近藤 余範, et al. 長さ計測分野における計量標準の整備・供給状況と今後. 社団法人日本計量振興協会. 2010. 60. 3. 11-21
  • HORI Yasuaki, HIRAI Akiko, MINOSHIMA Kaoru. Establishment of the Refractive Index Standard for Optical Glasses. Japanese journal of optics. 2010. 39. 3. 136-140
ｍore...
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