Rchr
J-GLOBAL ID：200901035718989830   Update date: Apr. 30, 2020

Matsumura Shosaku

マツムラ ショウサク | Matsumura Shosaku
Affiliation and department：
Former Institution / Organization Musashi Institute of Technology, Faculty of Engineering, Department of Electrical and Electronic Engineering

About Former Institution / Organization Musashi Institute of Technology, Faculty of Engineering, Department of Electrical and Electronic Engineering


Research field  (2)： Measurement engineering ,  Thin-film surfaces and interfaces
Research keywords  (4)： プラズマ源 ,  プラズマ計測 ,  Plasma Source ,  Plasma Diagnostic
Research theme for competitive and other funds  (4)：
  • 1995 - 2002 プラズマ中の負イオン計測
  • 1995 - 2002 Measurement Negative Ion in Plasma
  • 1990 - 2000 プロセスプラズマの計測
  • 1990 - 2000 diagnostics of Plasma Processing
MISC (20)：
ｍore...
Education (3)：
  • - 1968 Shizuoka University
  • - 1968 Shizuoka University Graduate School, Division of Engineering
  • - 1966 Shizuoka University Faculty of Engineering
Professional career (1)：
  • Doctor of Engineering (Shizuoka University)
Work history (5)：
  • 1993 - - 同大学 教授
  • 1993 - - Professor, Musashi-Institute of Technology
  • 1968 - 1976 武蔵工大 助手
  • 1968 - 1976 Research Associate, Musashi-Institute of
  • Technology
Committee career (1)：
  • 1994 - 1996 応用物理学会 世話人
Association Membership(s) (2)：
応用物理学会 ,  The Japan Society of Applied Physics
※ Researcher’s information displayed in J-GLOBAL is based on the information registered in researchmap. For details, see here.

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