Research field (7)：
Ophthalmology
, Measurement engineering
, Robotics and intelligent systems
, Mechanics and mechatronics
, Machine elements and tribology
, Design engineering
, Machine materials and mechanics
Research keywords (4)：
光学検査技術
, 電子ビーム応用検査技術
, マスク欠陥検査技術
, 電子ビーム描画技術
Research theme for competitive and other funds (3)：
