Rchr
J-GLOBAL ID：200901039725894106   Update date: Aug. 26, 2022

Kubo Takashi

クボ タカシ | Kubo Takashi
Affiliation and department：
Hiroshima Kokusai Gakuin University Faculty of Engineering, Hiroshima Kokusai Gakuin University Faculty of Engineering Department of Communication, Information and Media

About Hiroshima Kokusai Gakuin University Faculty of Engineering, Hiroshima Kokusai Gakuin University Faculty of Engineering Department of Communication, Information and Media


Research field  (3)： Applied physics - general ,  Basic plasma science ,  Applied plasma science
Research keywords  (2)： プラズマプロセス ,  Plasma Processing
Research theme for competitive and other funds  (4)：
  • 1995 - 1998 高周波放電におけるプローブ測定
  • 1992 - 高周波放電に関する研究
  • Measurements of rf plasma with probe methods
  • Study on radio frequency discharge
MISC (19)：
ｍore...
Professional career (1)：
  • (BLANK)
Association Membership(s) (2)：
真空協会 ,  応用物理学会
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