Rchr
J-GLOBAL ID：200901042704346070   Update date: Dec. 26, 2022

TSUYOSHI MASUDA

マスダ ツヨシ | TSUYOSHI MASUDA
Affiliation and department：
Entegris, Inc. (CMC Materials Inc.)

About Entegris, Inc. (CMC Materials Inc.)


Research field  (4)： Analytical chemistry ,  Basic physical chemistry ,  Nanostructure physics ,  Nanostructure chemistry
Research keywords  (8)： CMP ,  スラリー ,  レオロジー ,  コロイド ,  CMP ,  Slurry ,  Rheology ,  Colloid
Research theme for competitive and other funds  (2)：
  • 2005 - 2008 CMPスラリーのキャラクタリゼーションと研磨機構の解明
  • 2005 - 2008 Characterization of CMP slurry and Mechanisms of polishing
Professional career (1)：
  • 工学修士
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