Rchr

J-GLOBAL ID：200901044148302494 Update date: Mar. 06, 2005

KAWAHARA JUN

カワハラジュン | KAWAHARA JUN

Affiliation and department：
Job title： Graduate Student

Research field (2)： Electronic devices and equipment , Electric/electronic material engineering

Research keywords (2)：層間絶縁膜 , luten Layer Dielectrics

Research theme for competitive and other funds (1)：

2004 - 2006 層間絶縁膜の低誘電率化

MISC (4)：

Highly thermal-stable, plasma polymerized BCB polymer film. Plasma Sources Science and Technology. 2003. Vol. 12, pp. S80-S88
Highly thermal-stable, plasma polymerized BCB polymer film. Plasma Sources Science and Technology. 2003. Vol. 12, pp. S80-S88
Analysis of Processing Damage on a Ferroelectric SrBi2Ta2O9 Capacitor for Ferroelectric Random Access Memory Device Fabrication. Japanese Journal of Applied Physics. 2001. Vol40, p. 2341
Analysis of Processing Damage on a Ferroelectric SrBi2Ta2O9 Capacitor for Ferroelectric Random Access Memory Device Fabrication. Japanese Journal of Applied Physics. 2001. Vol40, p. 2341

Professional career (1)：

- (Tokyo Institute of Technology)

Association Membership(s) (1)：

応用物理学会

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