Totsu Kentaro

トツケンタロウ | Totsu Kentaro

Affiliation and department：
Job title： Professor
Homepage URL (2)： http://www.mu-sic.tohoku.ac.jp/coin/ , http://www.mu-sic.tohoku.ac.jp/index_e.html

Research field (1)： Nano/micro-systems

Research keywords (5)： Microfabrication , MEMS , Microsystem , Micromachine , Sensor

Research theme for competitive and other funds (9)：

2017 - 2020 Development of High Performance Smart Composite Material with Enhancing Domain Density at the PZT/Magnetostrictive Interface for Designing Energy Harvesting, IoT Devices
2015 - 2017 Development of high density and accuracy tactile device using MEMS technology
2007 - 2011 Massive Parallel Electron Beam Lithography System
2004 - 2008 Development of In Vivo Local Measurement and Treatment System
2007 - 2008 ナノメカニカル・単電子トランジスタによるナノセンシング

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Papers (83)：

庄子征希, 上瀧英郎, 森山雅昭, 戸津健太郎. Evaluation of Thick-Film Photoresist for Grayscale Lithography Utilizing Direct Laser Writing. 電気学会論文誌 E. 2020. 140. 5. 35-39
Wataru Yashiro, Susumu Ikeda, Yasuo Wada, Kentaro Totsu, Yoshio Suzuki, Akihisa Takeuchi. Probing Surface Morphology using X-ray Grating Interferometry. SCIENTIFIC REPORTS. 2019. 9. 14120
Kentaro Totsu, Masaaki Moriyama, Masayoshi Esashi. MEMS research is better together. NATURE ELECTRONICS. 2019. 2. 4. 134-136
Masaaki Moriyama, Yukio Suzuki, Kentaro Totsu, Hideki Hirano, Shuji Tanaka. Metal-bonding-based hermetic wafer-level MEMS packaging technology using in-plane feedthrough: Hermeticity and high frequency characteristics of thick gold film feedthrough. ELECTRICAL ENGINEERING IN JAPAN. 2019. 206. 2. 44-53
Masaaki Moriyama, Kentaro Totsu, Shuji Tanaka. Sol-Gel Deposition and Characterization of Lead Zirconate Titanate Thin Film Using Different Commercial Sols. SENSORS AND MATERIALS. 2019. 31. 8. 2497-2509

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MISC (43)：

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Patents (8)：

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Books (4)：

Lectures and oral presentations (11)：

UV-imprint lithography based on UV-curable PDMS
(The 15th Chitose International Forum on Photonics Science & Technology 2014)
MEMS Commercialization in Japan
(MANCEF’s COMET in Tokyo 2013)
Hands-on Access Fabrication Facility
(International Symposium on Integrated Microsystems (ISIM2011) 2011)
MEMS Hands-on access facility at Tohoku University
(Workshop on Innovation and Commercialization of Micro & Nanotechnology (ICMAN2011) 2011)
MEMS Innovation in Sendai
(The 2nd International Workshop on Innovation ICMAN2008 2008)

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Education (2)：

- 2004 Tohoku University Graduate School, Division of Engineering Mechatronics and Precision Engineering
- 1999 Tohoku University Faculty of Engineering Mechatronics and Precision Engineering

Professional career (1)：

Work history (5)：

2021/04 - 現在 Tohoku University Micro System Integration Center Professor
2017/04 - 2021/03 Tohoku Univeristy Micro System Integration Center Deputy Director
2010/04 - 2021/03 Micro System Integration Center, Tohoku University Associate Professor
2007/04 - 2010/03 Office of Cooperative Research and Development, Tohoku University Assistant Professor
2004/04 - 2007/03 Graduate School of Engineering, Tohoku University Research Associate

Awards (9)：

2019/01 - 文部科学省ナノテクノロジープラットフォーム平成30年度「秀でた利用成果」最優秀賞受賞広帯域波長掃引パルス量子カスケードレーザの開発
2017/03 - 応用物理学会第8回集積化MEMSシンポジウム優秀論文賞厚いAu膜の面内高周波フィードスルーを用いたAu-Au接合気密封止MEMSパッケージング技術
2016/01 - 文部科学省ナノテクノロジープラットフォーム平成27年度「秀でた利用成果」音響光学フィルタの開発
2015/10 - IMAPS IMAPS2015 Best of Session Hermetic Seal Bonding at Low-temperature with Sub-micron Gold Particles for Wafer Level Packaging
2014/10 - 電気学会センサ・マイクロマシン部門第31回「センサ・マイクロマシンと応用システム」シンポジウム優秀技術論文賞超並列電子線描画装置用アクティブマトリクスナノ結晶シリコン電子源の開発と動作特性評価

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Association Membership(s) (4)：

The Institute of Electrical Engineers of Japan , The Japan Society of Mechanical Engineers , IEEE , 精密工学会

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