Rchr
J-GLOBAL ID：200901046181872444   Update date: Sep. 13, 2022

Yamaguchi Tomuo

ヤマグチ トムオ | Yamaguchi Tomuo
Affiliation and department：
Former Institution / Organization Shizuoka University Research Institute of Electronics Nanodevices and Nanomaterials Division

About Former Institution / Organization Shizuoka University Research Institute of Electronics Nanodevices and Nanomaterials Division


Job title： Professor
Research field  (1)： Optical engineering and photonics
Research keywords  (2)： 分光エリプソメトリ 光学的性質 薄膜 ,  Spectroscopic ellipsometry Optical properties Thin film
Research theme for competitive and other funds  (6)：
  • 光学系の設計
  • 表面・薄膜の光学的評価
  • 高速・高精度分光エリプソメトリの開発と応用
  • Design of optical systems
  • Optical characterization of surfaces and thin films
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MISC (452)：
ｍore...
Patents (4)：
  • 非晶質材料の分光計測法
  • 不完全位相補償子を用いた4ゾーン消光型分光エリプソメトリ
  • Spectroscopic method of amorphous materials
  • Four zone null spectroscopic ellipsometry using inperfect phase compensator
Works (8)：
  • 分光エリプソメトリを用いた基板温度計測についての研究
    2005 - 2006
  • Substrate temperature measurement using spectroscopic ellipsometry
    2005 - 2006
  • 分光エリプソメトリ法による薄膜の光学物性の研究
    2001 - 2004
  • Spectro ellipsometric study of thin films
    2001 - 2004
  • 多層薄膜の分光計測法に関する研究
    1997 - 2004
ｍore...
Education (2)：
  • - 1965 Tokyo University of Science
  • - 1965 Tokyo University of Science Faculty of Science
Professional career (1)：
  • (BLANK) (The University of Tokyo)
Work history (4)：
  • 1965 - 1974 The University of Tokyo The Faculty of Engineering
  • 1965 - 1974 Research Associate, Faculty of engineering, The University of Tokyo
  • 1974 - - 静岡大学電子工学研究所
  • 1974 - - Research Institute of Electronics, Shizuoka University
Awards (1)：
  • 1976 - 光学論文賞
Association Membership(s) (3)：
日本光学会 ,  表面科学会 ,  応用物理学会
※ Researcher’s information displayed in J-GLOBAL is based on the information registered in researchmap. For details, see here.

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