Research field (1):
Manufacturing and production engineering
Research keywords (7):
コンビナトリアル
, Metallic glass
, Shape memory alloys
, マイクロマシン
, 金属材料一般
, MEMS
, Metallic materials in general
Research theme for competitive and other funds (12):
2019 - 2023 Measurement and control of internal stress in thin film metallic glass using combinatorial technology
2017 - 2020 Comibinatorial evaluation of Ti-Ni based high formable shape memory alloys
2015 - 2016 3D printing method of Ti-Ni-based thin film metallic glass / shape memory alloys
2015 - 2016 薄膜金属ガラスを用いた超小型高感度静電容量型圧力センサの開発
2008 - 2012 Combinatorial Search and Nanoprocessing of Pt-free Amorphous Alloys for Glass Molding Die
2008 - 2009 高性能永久磁石薄膜マイクロアクチュエータの基礎研究
2007 - 2008 高機能金型材料の創成とそのナノ加工
2007 - 2008 Searching for the Thin film Amorphous Alloy for the Mold using Combinatorial Material Method
2005 - 2006 Ir基及びRu基薄膜金属ガラスの探査と物性値調査
2003 - 2005 Research on thin film metallic glasses as MEMS material and those three dimensional fabrication methods
2002 - 2002 薄膜金属ガラスの低電気抵抗率化
2002 - 2002 Reduction of Electrical Resistivity in Thin Film Metallic Glass
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Papers (60):
Kanna Omae, Takahiro Yamazaki, Chiemi Oka, Junpei Sakurai, Seiichi Hata. Stress measurement based on magnetic Barkhausen noise for thin films. MICROELECTRONIC ENGINEERING. 2023. 279
Shun Takase, Takahiro Yamazaki, Chiemi Oka, Junpei Sakurai, Seiichi Hata. Novel measurement method of internal stress in thin films using micro spring structure. MECHANICAL ENGINEERING JOURNAL. 2023
Atsuki Kobayashi, Kohya Sano, Junpei Sakurai, Hosei Nagano, Seiichi Hata, Chiemi Oka. Unidirectional Pore Formation in Resins Using a Magnetic-Nanoparticle-Chain Template. IEEE MAGNETICS LETTERS. 2023. 14
Fuyuki Haga, Takahiro Yamazaki, Chiemi Oka, Seiichi Hata, Yuto Hoshino, Junpei Sakurai. Effect of structural relaxation at bellow crystallization temperature on internal stress of Ni-Nb-Zr thin film amorphous alloys diaphragm for micro electromechanical systems sensors. JAPANESE JOURNAL OF APPLIED PHYSICS. 2022. 61. SD
Shin Inoue, Takahiro Yamazaki, Chiemi Oka, Seiichi Hata, Junpei Sakurai. Combinatorial search for Ti-Ni-Hf high formable shape memory alloys. JAPANESE JOURNAL OF APPLIED PHYSICS. 2022. 61. 6
Ryo Morisaki, Yuuki Hirai, Junpei Sakurai, Mizue Mizoshiri, Chiemi Oka, Takami Hirai, Tomonori Takahashi, Hiroyuki Tsuji, Seiichi Hata. Development and evaluation of the novel FAB gun. European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019. 2019. 104-105
- 2002 University of Tsukuba Graduate School, Division of Engineering
- 1997 University of Tsukuba
Professional career (1):
Doctor of Engineering (University of Tsukuba)
Work history (5):
2014/07 - 現在 Nagoya University
2011/09 - 2014/06 東京エレクトロン株式会社 PVE開発本部
2002 - 2011/08 -:精密工学研究所 助手
2002 - -:Precision and Intelligence Laboratory Research Associate
Tokyo Institute of Technology Precision and Intelligence Laboratory, Precision Machine Devices Division, Precision and Intelligence Laboratory Precision Machine Devices Assistant Professor
Association Membership(s) (8):
Material Reasearch Society
, SPIE
, 精密工学会
, 日本金属学会
, Material Reasearch Society
, SPIE
, THE JAPAN SOCIETY OF APPLIED PHYSICS
, THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN