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J-GLOBAL ID：200901056571771679   Update date: Feb. 01, 2024

Misumi Ichiko

ミスミ イチコ | Misumi Ichiko
Affiliation and department：
National Institute of Advanced Industrial Science and Technology

About National Institute of Advanced Industrial Science and Technology


Homepage URL  (1)： http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=I19947117
Research field  (2)： Measurement engineering ,  Mechanics and mechatronics
Papers (63)：
  • Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Evaluation of the change in photoresist sidewall roughness due to electron beam-induced shrinkage using atomic force microscopy. Journal of Micro/Nanopatterning, Materials, and Metrology. 2023. 22. 04
  • Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda, Satoru Takahashi. Developmental framework of line edge roughness reference standards for next-generation functional micro-/nanostructures. Precision Engineering. 2023. 83. 152-158
  • Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda, Satoru Takahashi. Effect of white noise on roughness measurements of self-affine fractals. Measurement Science and Technology. 2023. 34. 10. 105003-105003
  • Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Photoresist shrinkage observation by a metrological tilting-AFM. Metrology, Inspection, and Process Control XXXVII. 2023
  • Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Enhancing the precision of 3D sidewall measurements of photoresist using atomic force microscopy with a tip-tilting technique. Journal of Applied Physics. 2023. 133. 6. 065302-065302
ｍore...
MISC (12)：
  • OSAWA Sonko, GONDA Satoshi, MISUMI Ichiko, SATO Osamu, SUGAWARA Kentaro. Standards for Nano-scale Measuring Instruments. 2009. 63. 5. 97-102
  • OSAWA Sonko, GONDA Satoshi, MISUMI Ichiko, SATO Osamu, SUGAWARA Kentaro. Standards for Nano-Scale Measuring Instruments. 2008. 47. 9. 757-762
  • 三隅 伊知子, 佐藤 理, 菅原 健太郎. 測長原子間力顕微鏡を用いた段差校正 (特集 段差計測). 計測標準と計量管理. 2007. 57. 1. 15-21
  • Ichiko Misumi, Gaoliang Dai, Gwo-Sheng Peng. Final report on Supplementary Comparison APMP.L-S2: Bilateral comparison on pitch measurements of nanometric lateral scales (50 nm and 100 nm) between NMIJ/AIST (Japan) and PTB (Germany). METROLOGIA. 2007. 44
  • Pitch measurement of 150 nm 1D-Grating standards using an nanometrological atomic force microscope. 産総研計量標準報告. 2005. 3. 4. 499-506
ｍore...
Professional career (1)：
  • 博士(工学) (東京大学)
Awards (9)：
  • 2019/05 - 2018 Highlights of Measurement Science and Technology
  • 2018/06 - Precision Engineering Certificate of Outstanding Contribution in Reviewing awarded April 2018 to Ichiko Misumi in recognition of the contributions made to the quality of the journal
  • 2017/01 - The International Society for Optical Engineering, SPIE Certificate of appreciation awarded to Ichiko Misumi for serving as a reviewer for Journal of Micro/Nanolithography, MEMS, and MOEMS during the calendar year of 2016
  • 2014/09 - 11th IMEKO Symposium LMPMI 2014 International Conference Sep. 2-5, 2014, Tsukuba, Japan Excellent Presentation Award "PROFILE SURFACE ROUGHNESS MEASUREMENT USING METROLOGICAL ATOMIC FORCE MICROSCOPE AND UNCERTAINTY EVALUATION"
  • 2011/04 - 平成23年度文部科学大臣表彰(科学技術賞(開発部門)) 「標準ナノスケールと校正技術の開発」
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Association Membership(s) (1)：
公益社団法人 精密工学会
※ Researcher’s information displayed in J-GLOBAL is based on the information registered in researchmap. For details, see here.

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