Takahashi Masaharu

タカハシマサハル | Takahashi Masaharu

Affiliation and department：
Homepage URL (1)： http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=M31543301

Research field (5)： Material fabrication and microstructure control , Structural and functional materials , Manufacturing and production engineering , Nano/micro-systems , Nanomaterials

Research keywords (1)：ナノインプリント先端微細加工技術リソグラフィ実装技術 MEMS

MISC (9)：

Sung Won Youn, Masaharu Takahashi, Hiroshi Goto, Ryutaro Maeda. A study on focused ion beam milling of glassy carbon molds for the thermal imprinting of quartz and borosilicate glasses. JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2006. 16. 12. 2576-2584
S. W. Youn, M. Takahashi, H. Goto, T. Kobayashi, R. Maeda. The effect of heat-treatment conditions on mechanical and morphological properties of a FIB-milled glassy carbon mold with micro patterns. JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 2006. 16. 7. 1277-1284
TAKAHASHI Masaharu, MAEDA Ryutaro. Large-Area Micro-Hot Embossing of Glass Materials with Glassy Carbon Mold Machined by Dicing. Journal of the Japan Society for Technology of Plasticity. 2006. 47. 549. 963-967
TAKAHASHI Masaharu, MAEDA Ryutaro, SUGIMOTO Koh-ichi. Micro/nano-Hot Embossing of Quartz Glass Materials with Glassy Carbon Mold Prepared by Focused Ion Beam. Journal of the Japan Society for Technology of Plasticity. 2006. 47. 549. 958-962
研削加工型による石英ガラスのホットエンボス成形. 塑性加工連合講演会講演論文集. 2005. 56. 585-586

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Association Membership(s) (2)：

日本塑性加工学会 , 精密工学会

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