Rchr
J-GLOBAL ID：200901080864516973
Update date: Feb. 05, 2018
TATSUO MORIMOTO
モリモト タツオ | TATSUO MORIMOTO
Affiliation and department：
Job title：
Assistant Professor
Research field (1)：
Electronic devices and equipment
Research keywords (3)：
露光装置
, フォトマスク
, 半導体回路
Research theme for competitive and other funds (2)：
- 2004 - 現在 瞬時マスク描画システムの研究
- 2005 - 2008 レーザー描画基礎技術の研究開発
Education (1)：
- - 2004 Tohoku University Graduate School, Division of Engineering Department of Electronic Engineering
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