Rchr
J-GLOBAL ID：200901085087060644   Update date: Aug. 29, 2020

Hata Nobuhiro

ハタ ノブヒロ | Hata Nobuhiro
Affiliation and department：
National Institute of Advanced Industrial Science and Technology

About National Institute of Advanced Industrial Science and Technology


Homepage URL  (1)： http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=N53140655
Research field  (5)： Chemical reaction and process system engineering ,  Electronic devices and equipment ,  Electric/electronic material engineering ,  Optical engineering and photonics ,  Thin-film surfaces and interfaces
Research keywords  (1)： シリコン 配線技術 低誘電率材料 層間絶縁膜
Research theme for competitive and other funds  (1)：
  • Low-k 材料・配線技術
MISC (28)：
ｍore...
Education (2)：
  • The University of Tokyo
  • 東京大学大学院
Professional career (1)：
  • 工学博士
Association Membership(s) (4)：
Materials Research Society ,  (社)応用物理学会 ,  Materials Research Society ,  Japan Society of Applied Physics
※ Researcher’s information displayed in J-GLOBAL is based on the information registered in researchmap. For details, see here.

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