Rchr

J-GLOBAL ID：200901085406072014 Update date: Feb. 01, 2024

Ishida Makoto

イシダマコト | Ishida Makoto

Affiliation and department：
Job title： Professor Emeritus
Homepage URL (2)： http://www.int.ee.tut.ac.jp/icg/ , http://int.ee.tut.ac.jp/icg/wp/en/

Research field (2)： Electronic devices and equipment , Electric/electronic material engineering

Research keywords (9)： crystal growth , MEMS , electronic material , thin film , smart sensor , Integrated circuits , sensor , semiconductor devices , Semiconductor Material

Research theme for competitive and other funds (37)：

2013 - 2016 Brain implantable electronics for long-term neural recording
2008 - 2013 An implantable chip with integrated microprobe/tube arrays for electrical neural recording, stimulation, and drug delivery applications
2008 - 2012 強誘電体薄膜センサを用いたインテリジェントイメージセンシング
2007 - 2012 Frontiers of Intelligent Sensing
2005 - 2011 Development of Intergrated Ubiquitous Microsensor Devices for Peace and Security of Human Life

2006 - 2008 農業用マルチモーダルセンシングシステム

2005 - 2008 高性能赤外線センサの開発

2005 - 2008 超音波イメージセンサによる生育状況モニタおよび管理システムの開発

2005 - 2008 マイクロチップ技術による医療計測装置の開発

2005 - 2008 知能性基板を用いた高感度・超小型強誘電体薄膜スマートセンサの開発

2006 - 2008 Development of filterless spectral image sensors for bio-chip applications

2002 - 2007 インテリジェントヒューマンセンシング

2005 - 2007 Three-dimensional epitaxial silicon microprobe array integrated on highly functional smart sensing chip

2002 - 2006 ネットワーク融合型スマートセンサ

2002 - 2005 SMART MICRO CHIP BY SELECTIVE GROWN Si-MICROPROBE ELECTRODE ARRAY ON INTEGRATED CIRCUIT

2003 - 2005 Super Highly Sensitive Non visible Imaging Devices Using Vacuum Nano Technology

2001 - 2004 Substrate using epitaxial Al_2O_3 film for hetero-epitaxial growth and device applications

2003 - 2004 Analysis of spatio-temporarl mechanisms on outer plexiform layer in retina by the multichannel microprobe electrodes array chip

2001 - 2002 Analysis of spatio-temporal light responses of retinal cells using a new multi-electrode array on integrated circuit

2000 - 2001 単結晶シリコン選択成長による生体電位計測用スマート極微細多電極チップ形成の研究

1998 - 2000 FUNDAMENTAL RESEARCH FOR QUANTUM DEVICES CONSTRUCTED WITH MULTI-LAYERS OF VERY THIN EPITAXIAL Al2O3 AND Si

1998 - 1998 高専におけるLSI設計教育高度化に向けた調査研究

1998 - 1998 非晶質傾斜超格子を用いた極低雑音アバランシェ増幅型光導電膜の研究

1997 - 1998 Research on a vision chip based on biological systems

1996 - 1997 High-quality Si thin film growth on single-crystalline Al203 films

1995 - 1995 電子ビーム励起直接選択エピタキシャル成長による量子構造形成方法の研究

1994 - 1995 Silicon Accelerometer for high temperature applications with Double SOI structure

1994 - 1995 Basic research on selective epitaxy in very limited areas

1994 - 1994 電子ビーム励起直接選択エピタキシャル成長による量子構造形成方法の研究

1992 - 1992 紫外光励起ガスソースMBE法によるエピタキシャル絶縁薄膜の超低温形成に関する研究

1991 - 1992 In-situ Si selective-epitaxial grown SOI structures using Electron beam graphic system

1991 - 1991 紫外光励起ガスソ-スMBE法によるエピタキシャル絶縁薄膜の超低温形成に関する研究

1990 - 1990 紫外光励起ガスソ-スMBE法によるエピタキシャル絶縁薄膜の起低温形成に関する研究

1989 - 1990 超高真空中でのエキシマレ-ザ励起AlーSi界面形成過程のXPS分析による研究

1989 - 1990 Formation of Ultra-Thin Hetero-Epitaxial SOI Structure and Its Application to Thin Film Transistors.

1989 - 1989 超高真空中でのエキシマレ-ザ励起Al-Si界面形成過程の×PS分析による研究

1986 - 1987 Fundamental Research of Epitaxial Growth of Insulator Films Using Ultra-Violet Irradiation

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Papers (125)：

Sawako Tanaka, Young Joon Choi, Makoto Ishida, Kazuaki Sawada, Hiromu Ishii, Katsuyuki Machida, Yasuhiko Nikaido, Mitsumasa Saito, Shin ichi Yoshida. Sensing Legionella by photogate-type fluorescence sensor: Application to Legionella dumoffii. Electronics and Communications in Japan. 2020. 103. 11-12. 83-89
Tanaka Sawako, Choi Yong Joon, Ishida Makoto, Sawada Kazuaki, Ishii Hiromu, Machida Katsuyuki, Nikaido Yasuhiko, Saito Mitsumasa, Yoshida Shinichi. Dependence of Fluorescence Intensity of Legionella on Excitation Light Intensity II. JSAP Annual Meetings Extended Abstracts. 2019. 2019.2. 3096-3096
Yoshihiro Kubota, Shota Yamagiwa, Hirohito Sawahata, Shinnosuke Idogawa, Shuhei Tsuruhara, Rika Numano, Kowa Koida, Makoto Ishida, Takeshi Kawano. Long nanoneedle-electrode devices for extracellular and intracellular recording in vivo. Sensors and Actuators B: Chemical. 2018. 258. 1287-1294
Yusuke Morikawa, Shota Yamagiwa, Hirohito Sawahata, Rika Numano, Kowa Koida, Makoto Ishida, Takeshi Kawano. Ultrastretchable Kirigami Bioprobes. Advanced Healthcare Materials. 2018. 7. 3
Yusuke Morikawa, Shota Yamagiwa, Hirohito Sawahata, Rika Numano, Kowa Koida, Makoto Ishida, Takeshi Kawano. Flexible Devices: Ultrastretchable Kirigami Bioprobes (Adv. Healthcare Mater. 3/2018). Advanced Healthcare Materials. 2018. 7. 3. 1870017-1870017

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MISC (260)：

田中佐和子, 崔容俊, 石田誠, 澤田和明, 石井仁, 町田克之, 二階堂靖彦, 齋藤光正, 吉田眞一. フォトゲート型光センサによるレジオネラ属菌の菌種識別-Identification of Legionella Species by Photogate-Type Optical Sensor-第11回集積化MEMSシンポジウム. 「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編]. 2019. 36. 5p
Yusuke Morikawa, Shota Yamagiwa, Hirohito Sawahata, Rika Numano, Kowa Koida, Makoto Ishida, Takeshi Kawano. Stretchable micro-doughnuts Kirigami bioprobe. 2018 IEEE Micro Electro Mechanical Systems (MEMS). 2018. 2018-January. 186-189
Yuto Kita, Hiroshi Kubo, Hirohito Sawahata, Shota Yamagiwa, Xian Long Angela Leong, Rika Numano, Kowa Koida, Makoto Ishida, Takeshi Kawano. Single needle electrode-topped amplifier package (STACK) for in vivo applications. 2018 IEEE Micro Electro Mechanical Systems (MEMS). 2018. 2018-January. 178-181
Shota Yamagiwa, Hirohito Sawahata, Rika Numano, Makoto Ishida, Kowa Koida, Takeshi Kawano. Dissolvable material-sheathed microneedle-electrode device slid into a narrow gap of the brain. 2018 IEEE Micro Electro Mechanical Systems (MEMS). 2018. 2018-January. 340-343
澤畑博人, 西川魁, 山際翔太, 鯉田孝和, 沼野利佳, 石田誠, 河野剛士. A calculation technique of the ECoG horizontal propagation vector in the brain. 「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編]. 2017. 34. 1-5

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Patents (42)：

HOLLOW MICROTUBE STRUCTURES, PRODUCTION METHOD THEREOF, AND LIVING ORGANISM INSPECTION DEVICE
半導体集積装置およびその作製方法
形状可変ミラー
多層構造ウエハーおよびその製造方法
LAMINATE STRUCTURE ON SEMICONDUCTOR SUBSTRATE

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Books (9)：

Integration Technology for Heterogeneous Advanced Devices : Basics and Applications
2012 ISBN:9784781305868
集積回路
新インターユニバーシティ 2011 ISBN:9784274209888
バイオテクノロジーシリーズヘルスケアとバイオ医療のための先端デバイス機器
シーエムシー出版 2009
Fabrication and Properties of ultra small・Si wire arrays with circuits by Vapor-Liquid-Solid Growth
Digest of 11th Int. Conf. Solid-State Sensors and Actuators 2001
Epitaxial technology for MEMS applications
Digest of 11th Int. Conf. Solid-State Sensors and Actuators 2001

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Lectures and oral presentations (5)：

Interdisciplinary Research at EIIRIS
(Irago Conf. 2014 2014)
Bio-Medical Applications of smart sensing devices
(SSDM2012 2012)
Smart Micro Sensing Chips for Life Innovation
(2012 MRS Spring meeting & Exhibit 2012)
Interdisciplinary Research of EIIRIS in Toyohashi Tech
(The 3rd International Symposium on Lifechips 2012)
Smart Micro Sensing Chips Using SOI Structures
(219th ECS Meeting 2011)

Works (3)：

MEMS Technology and Smart Sensors
2001 -
Epitaxial Al<sub>2</sub>O<sub>3</sub> on Si and device applications
2001 -
Preparation method of Semiconductor thin films
2001 -

Education (3)：

- 1979 Kyoto University Graduate School of Engineering
- 1979 Kyoto University Graduate School, Division of Engineering
- 1973 University of Toyama Faculty of Engineering

Professional career (1)：

Dr of Engineering (Kyoto University)

Work history (6)：

2016/04 - 現在 Toyohashi University of Technology Execticve Counselor, Professor Emeritus
2008 - 2016 Toyohashi University of Technology Vice President(Research Affairs)
1997 - 2016 Toyohashi Univeristy of Technology Professor
1986 - 1997 Toyohashi University of Technology Associate Professor
1981 - 1986 Toyohashi University of Technology Lecturer

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Committee career (1)：

2010/05 - 2012/03 電気学会理事 E部門長

Awards (8)：

2014/05 - 電気学会第23回業績賞
2014/03 - 電気学会平成25年度フェロー認定
2010/09 - 応用物理学会フェロー表彰第4回(2010年度)
2009/06 - IEEE Outstanding Paper Award Out-of-plane microwire force sensor arrays with embedded p-n diodes by selective vapor-liquid-solid growth
2009/05 - IEEJ Academic Promotion Award IEEJ Technical Developement Award

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Association Membership(s) (2)：

IEEJ (The Institute of Electrical Engineers of Japan) , JSAP (The Japan Society of Applied Physics)

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