Research keywords (8):
ピエゾ抵抗効果
, マイクロメカニックス
, 微細加工技術
, Piezoresistive effect
, Micro Electro Mechanical Systems
, Micro Electro Mechanical Systems
, Micromechanics
, Micromachining
THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN
, THE SOCIETY OF MATERIALS SCIENCE, JAPAN
, THE JAPAN SOCIETY OF MECHANICAL ENGINEERS