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ArticleJ-GLOBAL ID:200902000013109941整理番号:87A0406426

膜厚測定技術の動向

Trends of the film thickness measurement technology.

著者:大槻三男(ナノメトリクス・ジャパン)、佐々木勝利(ナノメトリクス・ジャパン)、杉浦康博(ナノメトリクス・ジャパン)
資料名:月刊Semiconductor World 巻:6 号:7 ページ:135-137
発行年:1987年06月
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.