Art
J-GLOBAL ID：200902000027056832   Reference number：91A0258231

Carbon-boron-nitrogen compounds obtained between 800 and 1000°C by LPCVD.

800から1000°Cの温度範囲でLPCVDにより炭素-ほう素-窒素化合物の生成
Author (3)：
SAUGNAC F

About SAUGNAC F

(Aerospatiale Aquitaine, Saint medard-en-jalles, FRA)

About Aerospatiale Aquitaine, Saint medard-en-jalles, FRA

, 
TEYSSANDIER F

About TEYSSANDIER F

(IMP, CNRS, Perpignan, FRA)

About IMP, CNRS, Perpignan, FRA

, 
MARCHAND A

About MARCHAND A

(Centre de Recherche Paul Pascal, Pessac, FRA)

About Centre de Recherche Paul Pascal, Pessac, FRA


Material：
Proceedings of the International Conference on Chemical Vapor Deposition  (CVD)

About Proceedings of the International Conference on Chemical Vapor Deposition


Volume： 11th  Page： 710-716  Publication year： 1990 
JST Material Number： E0761A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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LPCVD

About LPCVD

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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acetylene

About acetylene


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
温度範囲

About 温度範囲

, 
LPCVD

About LPCVD

, 
炭素

About 炭素

, 
ほう素

About ほう素

, 
窒素化合物

About 窒素化合物


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