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ArticleJ-GLOBAL ID:200902000027056832整理番号:91A0258231

Carbon-boron-nitrogen compounds obtained between 800 and 1000.DEG.C. by LPCVD.

800から1000°Cの温度範囲でLPCVDにより炭素‐ほう素‐窒素化合物の生成

著者:SAUGNAC F(Aerospatiale Aquitaine, Saint medard‐en‐jalles, FRA)、TEYSSANDIER F(IMP, CNRS, Perpignan, FRA)、MARCHAND A(Centre de Recherche Paul Pascal, Pessac, FRA)
資料名:Proc Int Conf Chem Vap Depos 巻:11th ページ:710-716
発行年:1990年
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