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ArticleJ-GLOBAL ID:200902000036754640整理番号:87A0204013

零熱膨張係数ガラスセラミックス製主軸を有する超精密平面研削盤の開発

Development of ultra-precision surface grinder with tool spindle of non-thermal expansion glass ceramics.

著者:坪井あきら(豊田工機)
資料名:豊田工機技報 巻:27 号:3 ページ:10-16
発行年:1987年01月31日
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