Art
J-GLOBAL ID:200902000044746559   Reference number:90A0919445

Formation of TiN films by the nitridation of Ti at high NH3 pressure. (II).

Tiの高圧NH3窒化によるTiN膜の形成 (II)
Author (5):
Material:
Volume: 51st  Issue:Page: 560  Publication year: Sep. 1990 
JST Material Number: Y0055A  Document type: Proceedings
Country of issue: Japan (JPN)  Language: JAPANESE (JA)
Terms in the title (5):
Terms in the title
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