Art
J-GLOBAL ID：200902000051298456   Reference number：85A0385269

Hydrogen analysis in silicon and silicon nitride layers.

けい素と窒化けい素の層中の水素の分析
Author (2)：
VANDERVORST W B

About VANDERVORST W B

(K.U. Leuven, Belgium)

About K.U. Leuven, Belgium

, 
MAES H E

About MAES H E

(K.U. Leuven, Belgium)

About K.U. Leuven, Belgium


Material：
Spectrochimica Acta. Part B. Atomic Spectroscopy  (Spectrochim Acta Pt B)

About Spectrochimica Acta. Part B. Atomic Spectroscopy


Volume： 40  Issue： 5/6  Page： 781-785  Publication year： 1985 
JST Material Number： B0793A  ISSN： 0584-8547  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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silicon

About silicon

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Physical analysis of elements in inorganic substances 
(CC03022H)

About Physical analysis of elements in inorganic substances

,  Surface structure of solids in general 
(BK15010E)

About Surface structure of solids in general

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
けい素

About けい素

, 
窒化けい素

About 窒化けい素

, 
層

About 層

, 
水素

About 水素

, 
分析

About 分析


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