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ArticleJ-GLOBAL ID:200902000054763397整理番号:86A0298445

Study of the interaction of plasmas with III-V semiconductor surfaces, application to passivation.

III‐V半導体表面とプラズマの相互作用の研究とその不動態化への応用

著者:FRIEDEL P(Lab. Electronique et de Physique Appliqu<span style=text-decoration:overline>e ́</span>e, France)、GOURRIER S(Lab. Electronique et de Physique Appliqu<span style=text-decoration:overline>e ́</span>e, France)、THEETEN J B(Lab. Electronique et de Physique Appliqu<span style=text-decoration:overline>e ́</span>e, France)・・・
資料名:Surf Sci 巻:168 号:1/3 ページ:635-644
発行年:1986年03月
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