Micro-Pattern Formation of LiNbO<sub>3</sub> Using Reactive Ion Etching.

HATTORI TETSUYA; SEMURA SHIGERU

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J-GLOBAL ID：200902000057709440 Reference number：92A0476930

Micro-Pattern Formation of LiNbO₃ Using Reactive Ion Etching.

反応性イオンエッチングによるLiNbO₃の微細加工

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Material：
Volume： 39th Issue： Pt 3 Page： 982 Publication year： Mar. 1992
JST Material Number： Y0054A Document type： Proceedings
Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Micro-Pattern Formation of LiNbO3 Using Reactive Ion Etching.

Micro-Pattern Formation of LiNbO₃ Using Reactive Ion Etching.