Art
J-GLOBAL ID：200902000065103089
Reference number：92A0423429
Growth Process of GaAs by MEE using AsH3.
ガスソースMEE法におけるGaAs成長プロセス
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Author (3)：
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,
Material：
Volume：
39th
Issue：
Pt 1
Page：
334
Publication year：
Mar. 1992
JST Material Number：
Y0054A
Document type：
Proceedings
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
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,
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