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ArticleJ-GLOBAL ID:200902000065103089整理番号:92A0423429

ガスソースMEE法におけるGaAs成長プロセス

Growth Process of GaAs by MEE using AsH3.

著者:川島稔(NTT 基礎研)、山口浩司(NTT 基礎研)、堀越佳治(NTT 基礎研)
資料名:応用物理学関係連合講演会講演予稿集 巻:39th 号:Pt 1 ページ:334
発行年:1992年03月
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