About J-GLOBAL

日本語

Font size
  • A
  • A

Articleの詳細情報

ArticleJ-GLOBAL ID:200902000076785912整理番号:92A0110597

フレネル回折のSR露光特性に及ぼす影響

Effects of Fresnel Diffraction on Resolution and Linewidth Control in SR Lithography.

著者:染村庸(NTT LSI研)、出口公吉(NTT LSI研)
資料名:応用物理学会学術講演会講演予稿集 巻:52nd 号:2 ページ:518
発行年:1991年10月
  • J-GLOBAL home
  • Bookmark J-GLOBAL

J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.