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ArticleJ-GLOBAL ID:200902000086557306整理番号:84A0009981

設計データとの比較によるレチクルパターン検査 I 基本方式

著者:浜田利満(日立生産技研)、岡本啓一(日立生産技研)、原靖彦(日立生産技研)・・・
資料名:自動制御連合講演会前刷 巻:26th ページ:441-442
発行年:1983年
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.