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ArticleJ-GLOBAL ID:200902000090372795整理番号:92A0445804

ダイヤモンド薄膜のX線マスク材への応用 (1)

Application of Diamond Films for Membranes of Xray Lithography. (1).

著者:菊池則文(三菱マテリアル)、山下博明(三菱マテリアル)、松井安次(三菱電機 中研)・・・
資料名:応用物理学関係連合講演会講演予稿集 巻:39th 号:Pt 2 ページ:458
発行年:1992年03月
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