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J-GLOBAL ID:200902000090372795
Reference number:92A0445804
Application of Diamond Films for Membranes of Xray Lithography. (1).
ダイヤモンド薄膜のX線マスク材への応用 (1)
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Author (5):
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Material:
Volume:
39th
Issue:
Pt 2
Page:
458
Publication year:
Mar. 1992
JST Material Number:
Y0054A
Document type:
Proceedings
Country of issue:
Japan (JPN)
Language:
JAPANESE (JA)
Terms in the title (3):
Terms in the title
Keywords automatically extracted from the title.
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