Art
J-GLOBAL ID：200902000090682360
Reference number：82A0334676
A new bird’s-beak free field isolation technology for VLSI devices.
VLSI装置のための新しいくちばし無しのフィールドアイソレーション技術
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Author (3)：
,
,
Material：
Volume：
1981
Page：
384-387
Publication year：
1981
JST Material Number：
C0829B
ISSN：
0163-1918
Document type：
Proceedings
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor integrated circuit
, Transistors
Terms in the title (4)：
Terms in the title
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,
,
,
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