Art
J-GLOBAL ID：200902000104339095
Reference number：89A0247098
Silicon transport in sputter-deposited tantalum layers grown under ion bombardment.
イオン照射下のスパッタ蒸着で作ったタンタル膜でのシリコンの輸送
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Author (4)：
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Material：
Volume：
6
Issue：
5
Page：
1519-1525
Publication year：
Sep. 1988
JST Material Number：
E0974A
ISSN：
1071-1023
CODEN：
JVTBD9
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Irradiational changes of metals
, 半導体-金属接触【’81~’92】
Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
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