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ArticleJ-GLOBAL ID:200902000104339095整理番号:89A0247098

Silicon transport in sputter-deposited tantalum layers grown under ion bombardment.

イオン照射下のスパッタ蒸着で作ったタンタル膜でのシリコンの輸送

著者:GALLAIS P(Univ. Angers, Angers, FRA)、HANTZPERGUE J J(Univ. Angers, Angers, FRA)、REMY J C(Univ. Angers, Angers, FRA)・・・
資料名:J Vac Sci Technol B 巻:6 号:5 ページ:1519-1525
発行年:1988年09月
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About J-GLOBAL

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