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ArticleJ-GLOBAL ID:200902000106173984整理番号:87A0281917

Laser-induced fluorescence studies of excimer laser ablation of Al2O3.

レーザ誘起蛍光を用いたAl2O3のエキシマレーザアブレーションの研究

著者:DREYFUS R W(IBM Thomas J. Watson Research Center, NY, USA)、KELLY R(IBM Thomas J. Watson Research Center, NY, USA)、WALKUP R E(IBM Thomas J. Watson Research Center, NY, USA)
資料名:Appl Phys Lett 巻:49 号:21 ページ:1478-1480
発行年:1986年11月24日
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