Electrical characteristics of metal-insulator-semiconductor diodes with ZrO<sub>2</sub>/SiO<sub>2</sub> dielectric films.

FUKUMOTO H; MORITA M; OSAKA Y

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J-GLOBAL ID：200902000115999577 Reference number：89A0477091

Electrical characteristics of metal-insulator-semiconductor diodes with ZrO₂/SiO₂ dielectric films.

ZrO₂/SiO₂誘電体薄膜を使った金属-絶縁物-半導体ダイオードの電気特性

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Volume： 65 Issue： 12 Page： 5210-5212 Publication year： Jun. 15, 1989
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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金属-絶縁体-半導体構造【’81~’92】 , Diodes

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Electrical characteristics of metal-insulator-semiconductor diodes with ZrO2/SiO2 dielectric films.

Electrical characteristics of metal-insulator-semiconductor diodes with ZrO₂/SiO₂ dielectric films.