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ArticleJ-GLOBAL ID:200902000116940720整理番号:92A0073576

反応性イオンビームエッチングによるリブ型ガーネット導波路の作製

Fabrication of Rib Waveguides by Reactive Ion Beam Etching.

著者:杉本直登(NTT 光エレクトロニクス研)、館彰之(NTT 光エレクトロニクス研)、渋川篤(NTT 光エレクトロニクス研)
資料名:応用物理学会学術講演会講演予稿集 巻:52nd 号:1 ページ:50
発行年:1991年10月
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