Art
J-GLOBAL ID：200902000130397877   Reference number：85A0344771

Aluminum growth on (100) indium phosphide.

InP(100)面におけるAl膜の成長
Author (3)：
HOUZAY F

About HOUZAY F

(C.N.E.T., France)

About C.N.E.T., France

, 
MOISON J M

About MOISON J M

(C.N.E.T., France)

About C.N.E.T., France

, 
BENSOUSSAN M

About BENSOUSSAN M

(C.N.E.T., France)

About C.N.E.T., France


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 3  Issue： 2  Page： 756-759  Publication year： Mar. 1985 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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indium phosphide

About indium phosphide

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Metallic thin films 
(BK14030T)

About Metallic thin films

,  半導体-金属接触【’81~’92】 
(BM03073E)

About 半導体-金属接触【’81~’92】

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
InP

About InP

, 
Al膜

About Al膜

, 
成長

About 成長


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