Art
J-GLOBAL ID：200902000135720196   Reference number：84A0099076

Defining the issues in wafer fab.

ウエハ作製の問題点定義
Author (1)：
HUTCHESON G D

About HUTCHESON G D

(VLSI Research Inc., Calif.)

About VLSI Research Inc., Calif.


Material：
Semiconductor International  (Semicond Int)

About Semiconductor International


Volume： 7  Issue： 1  Page： 46-50  Publication year： Jan. 1984 
JST Material Number： D0457B  ISSN： 0163-3767  Document type： Article
Article type： 解説  Country of issue： United States (USA)  Language： ENGLISH (EN)
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wafer

About wafer

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (4)：
Terms in the title
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ウエハ

About ウエハ

, 
作製

About 作製

, 
問題点

About 問題点

, 
定義

About 定義


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