Carrier transport test structure for characterization of poly-/monosilicon interfaces.

HU B; BERGER H H; GAUCKLER A; MUELLER B

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J-GLOBAL ID：200902000137870667 Reference number：92A0623601

Carrier transport test structure for characterization of poly-/monosilicon interfaces.

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Author (4)： , , ,
Material：
Volume： 1992 Page： 121-124 Publication year： 1992
JST Material Number： T0991A Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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