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ArticleJ-GLOBAL ID:200902000149357833整理番号:86A0362854

Ion-solid interactions during ion beam deposition of 74Ge and 30Si on Si at very low ion energies (0-200eV range)

極めて低いイオンエネルギー(0―200eVの範囲)でSi上への74Geと30Siをイオンビームたい積する際のイオン‐固体相互作用

著者:HERBOTS N(Oak Ridge National Lab., TN)、APPLETON B R(Oak Ridge National Lab., TN)、NOGGLE T S(Oak Ridge National Lab., TN)・・・
資料名:Nucl Instrum Method Phys Res Sect B Beam Interact Mater At 巻:13 号:1/3 ページ:250-258
発行年:1986年03月01日
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