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J-GLOBAL ID:200902000164808108   Reference number:91A0314138

A study of oxygen atom density in oxygen plasma by a laser induced fluorescence method.

レーザー誘起蛍光法による酸素プラズマ中の酸素原子密度の検討
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Volume: 1991  Issue:Page: 2.1  Publication year: Apr. 1991 
JST Material Number: S0653A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Plasma diagnostics 
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