Intelligent Differential Pressure Transmitter with Multiple Sensor Formed on a (110)-Oriented Circular Silicon Diaphragm.

SHIMADA S; UGAI S; SAKAMOTO S; SASE A; SHIMIZU Y

Art

J-GLOBAL ID：200902000165467665 Reference number：91A0913644

Intelligent Differential Pressure Transmitter with Multiple Sensor Formed on a (110)-Oriented Circular Silicon Diaphragm.

(110)配向の円形シリコンダイヤフラム上に形成された複数のセンサを持つインテリジェント差圧発信器

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Material：
Volume： 38 Issue： 5 Page： 379-384 Publication year： Oct. 1991
JST Material Number： C0234A ISSN： 0278-0046 CODEN： ITIED6 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Measuring methods and instruments of force,work load,pressure,friction

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