Art
J-GLOBAL ID：200902000170182660   Reference number：85A0358224

Microroughening permanent resist by a photo method.

光学的方法による微細粗面化永久レジスト
Author (2)：
CANESTARO M J

About CANESTARO M J

(IBM Corp.)

About IBM Corp.

, 
LAWRENCE W H

About LAWRENCE W H

(IBM Corp.)

About IBM Corp.


Material：
IBM Technical Disclosure Bulletin  (IBM Tech Disclosure Bull)

About IBM Technical Disclosure Bulletin


Volume： 27  Issue： 6  Page： 3586  Publication year： Nov. 1984 
JST Material Number： E0292B  ISSN： 0018-8689  CODEN： IBMTA  Document type： Article
Article type： 解説  Country of issue： United States (USA)  Language： ENGLISH (EN)
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circuit pattern generation

About circuit pattern generation

,...
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Thesaurus term/Semi thesaurus term
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integrated circuit bonding

About integrated circuit bonding


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
光学

About 光学

, 
粗面

About 粗面

, 
永久

About 永久

, 
レジスト

About レジスト


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