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ArticleJ-GLOBAL ID:200902000170288744整理番号:91A0950105

アークイオンプレーティング(AIP)法によるTiN薄膜の残留応力と機械的特性について

Residual stress and mechanical property of a TiN thin film according to the arc ion plating (AIP).

著者:木戸利也(神戸製鋼所)、玉垣浩(神戸製鋼所)、辻邦彦(神戸製鋼所)
資料名:表面技術協会講演大会講演要旨集 巻:84th ページ:88-89
発行年:1991年10月
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