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ArticleJ-GLOBAL ID:200902000174402169整理番号:92A0017377

Correlation Between Electrical and Structural Characterization of In0.53Ga0.47As/Si3N4 Interfaces on MIS Structures.

MIS構造上のIn0.53Ga0.47As/Si3N4界面の電気的および構造的特性の相互関係

著者:LOPEZ‐VILLEGAS J M(Univ. Barcelona, Barcelona, ESP)、MORANTE J R(Univ. Barcelona, Barcelona, ESP)、CORNET A(Univ. Barcelona, Barcelona, ESP)・・・
資料名:J Electrochem Soc 巻:138 号:11 ページ:3470-3473
発行年:1991年11月
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