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J-GLOBAL ID:200902001841698027   Reference number:92A0535707

Special issue : Precision washing technology.Trend of recent washing technology and basic theory of washing.

特集 精密洗浄技術 最近の洗浄技術の動向と洗浄の基礎理論
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Volume:Issue:Page: 11-16  Publication year: Jul. 1992 
JST Material Number: L1138A  ISSN: 0917-1819  CODEN: KTEKER  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Other liquid treatment  ,  Solic-state devices in general 
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