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J-GLOBAL ID:200902001854882668   Reference number:85A0331728

Secondary ion mass spectroscopy for bulk and surface analysis of particulate contaminants.

微粒子汚染物のバルクおよび表面分析の二次イオン質量分析
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Volume: 28  Issue:Page: 299-302  Publication year: Apr. 1985 
JST Material Number: E0226A  ISSN: 0038-111X  Document type: Article
Article type: 解説  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Measurement,testing and reliability of solid-state devices  ,  Mass spectrometry 
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